Kinematic mount for active galvo mirror alignment with multi-degree-of-freedom

ABSTRACT

A light detection and ranging system include a chassis and a galvo mirror assembly. The galvo mirror assembly includes a mirror holder including a handle and a galvo mirror for receiving and reflecting a light beam; a galvo mirror mount detachably mounted on the chassis and including a recess for receiving the handle of the mirror holder; two elastic members coupled to the handle of the mirror holder and the galvo mirror mount; two set screws in contact with the handle of the mirror holder and at least partially in the galvo mirror mount; and a galvo motor in the galvo mirror mount and configured to rotate the mirror holder. The two set screws are individually adjustable to change a compression force applied to at least one of the two elastic members and a tilt angle of the mirror holder (and the galvo mirror) with respect to a vertical direction.

CROSS-REFERENCES TO RELATED APPLICATIONS

The following four U.S. patent applications listed below (which includethe present application) are being filed concurrently, and the entiredisclosures of the other applications are incorporated by reference intothis application for all purposes:

-   -   application Ser. No. ______, filed Dec. 27, 2019, and entitled        “KINEMATIC MOUNT FOR ACTIVE MEMS ALIGNMENT WITH        MULTI-DEGREE-OF-FREEDOM” (Attorney Docket No.        103343-1165064-003000U5);    -   application Ser. No. ______, filed Dec. 27, 2019, and entitled        “KINEMATIC MOUNT FOR ACTIVE GALVO MIRROR ALIGNMENT WITH        MULTI-DEGREE-OF-FREEDOM” (Attorney Docket No.        103343-1165066-003010US);    -   application Ser. No. ______, filed Dec. 27, 2019, and entitled        “KINEMATIC MOUNT FOR ACTIVE RECEIVER ALIGNMENT WITH        MULTI-DEGREE-OF-FREEDOM” (Attorney Docket No.        103343-1165067-003020US); and    -   application Ser. No. ______, filed Dec. 27, 2019, and entitled        “KINEMATIC MOUNT FOR ACTIVE REFLECTIVE MIRROR ALIGNMENT WITH        MULTI-DEGREE-OF-FREEDOM” (Attorney Docket No.        103343-1171988-003030US).

BACKGROUND OF THE INVENTION

Modern vehicles are often equipped with sensors designed to detectobjects and landscape features around the vehicle in real-time to enabletechnologies such as lane change assistance, collision avoidance, andautonomous driving. Some commonly used sensors include image sensors(e.g., infrared or visible light cameras), acoustic sensors (e.g.,ultrasonic parking sensors), radio detection and ranging (RADAR)sensors, magnetometers (e.g., passive sensing of large ferrous objects,such as trucks, cars, or rail cars), and light detection and ranging(LiDAR) sensors.

A LiDAR system typically uses a light source and a light detectionsystem to estimate distances to environmental features (e.g.,pedestrians, vehicles, structures, plants, etc.). For example, a LiDARsystem may transmit a light beam (e.g., a pulsed laser beam) toilluminate a target and measure the time it takes for the transmittedlight beam to arrive at the target and then return to a receiver (e.g.,a photodetector) near the transmitter or at a known location. In someLiDAR systems, the light beam emitted by the light source may be steeredacross a region of interest according to a scanning pattern to generatea “point cloud” that includes a collection of data points correspondingto target points in the region of interest. The data points in the pointcloud may be dynamically and continuously updated, and may be used toestimate, for example, a distance, dimension, and location of an objectrelative to the LiDAR system, often with very high fidelity (e.g.,within about 5 cm).

In some implementations, the light beam emitted from the light sourcemay be steered using mirrors, such as galvo mirror scanners and/ormicro-electro-mechanical system (MEMS) mirrors. The returned light beammay be directed to the photodetector using optical components, such asmirrors, prisms, and lenses. The alignment of the various opticalcomponents on the light path may significantly impact the accuracy andother performance of the LiDAR system.

BRIEF SUMMARY OF THE INVENTION

Techniques disclosed herein relate generally to light detection andranging (LiDAR) systems. More specifically, and without limitation,disclosed herein are techniques for accurately aligning components in aLiDAR system. In particular, techniques disclosed herein relate tomechanical mounts with multiple degrees of freedom for adjustingpositions of small optical components in a compact LiDAR system that haslimited space. Various inventive embodiments are described herein,including devices, units, subsystems, modules, systems, methods, and thelike.

According to certain embodiments, a LiDAR system may include a chassisand a galvo mirror assembly. The galvo mirror assembly may include amirror holder including a handle and a galvo mirror for receiving andreflecting a light beam; a galvo mirror mount detachably mounted on thechassis and including a recess for receiving the handle of the mirrorholder; two elastic members coupled to the handle of the mirror holderand the galvo mirror mount; two set screws in contact with the handle ofthe mirror holder and at least partially in the galvo mirror mount; anda galvo motor in the galvo mirror mount and configured to rotate themirror holder. The two set screws may be individually adjustable tochange a compression force applied to at least one of the two elasticmembers and a tilt angle of the mirror holder (and the galvo mirror)with respect to a vertical direction. In some embodiments, the twoelastic members may include two compression springs, such as wavesprings. Each of the two compression springs may be characterized by aspring constant greater than a threshold value.

In some embodiments of the LiDAR system, the handle of the mirror holdermay include a bottom portion and a top portion, where the bottom portionmay be characterized by a first diameter larger than a second diameterof the top portion but smaller than a third diameter of the recess inthe galvo mirror mount. The bottom portion of the handle of the mirrorholder may be in the recess. The galvo mirror mount may include a bodythat includes the recess and a cap on the recess. The cap may include anaperture characterized by a fourth diameter larger than the seconddiameter but smaller than the first diameter, where the top portion ofthe handle of the mirror holder may extend through the cap and the twoelastic members, and the two set screws may be at least partially withinthe cap. In some embodiments, the cap may include a first half and asecond half, where the first half and the second half of the cap may bedetachably coupled to the body. In some embodiments, the two set screwsmay be at least partially within the first half of the cap, and the twoelastic members may be at least partially within the second half of thecap. Each of the first half and the second half of the cap may bedetachably coupled to the body by two or more fasteners. In someembodiments, the body of the galvo mirror mount may include a notch, thebottom portion of the handle of the mirror holder may include aprotrusion, and the protrusion may extend through the notch.

In some embodiments, the LiDAR system may include a first mirrorassembly. The first mirror assembly may include a bracket detachablymounted on the chassis; a first mirror mount configured to hold a firstmirror for receiving and deflecting the light beam reflected by thegalvo mirror to a photodetector; a first set of elastic connectorsattached to both the bracket and the first mirror mount to couple thefirst mirror mount to the bracket; and a first set of screws extendingthrough the bracket and in contact with the first mirror mount, wherethe first set of screws may be adjustable to change at least one of adistance or an orientation of the first mirror mount with respect to thebracket. In some embodiments, the first set of elastic connectors mayinclude three or more extension springs, and each of the three or moreextension springs may be attached to the bracket through a respectivefirst dowel pin and may be attached to the first mirror mount through arespective second dowel pin. The first set of screws may include threeor more screws arranged in noncollinear locations. The first set ofscrews may be individually adjustable to move the first mirror mountwith three degrees of freedom with respect to the bracket.

In some embodiments, the LiDAR system may include a second mirrorassembly detachably mounted on the chassis and configured to receive anddirect the light beam deflected by the first mirror to thephotodetector. In some embodiments, the LiDAR system may include acarrier frame detachably mounted on the chassis, a lens assembly coupledto the carrier frame, and a second set of screws extending through thecarrier frame. The lens assembly may include a lens holder detachablymounted on the carrier frame by a second set of elastic connectorsattached to the carrier frame and the lens holder, and a lens installedon the lens holder and positioned to receive the light beam deflected bythe first mirror to form an image on the photodetector. The second setof screws may be in contact with the lens holder, where the second setof screws may be adjustable to change at least one of a distance or anorientation of the lens holder with respect to the carrier frame. Insome embodiments, the LiDAR system may include a light sensor assemblydetachably mounted on the carrier frame and configured to both rotateand linearly move with respect to the carrier frame. The light sensorassembly may include a board mount, a sensor board installed on theboard mount, and the photodetector installed on the sensor board.

In some embodiments, the LiDAR system may include an optical scannerassembly. The optical scanner assembly may include a scanner board forinstalling an optical scanner thereon, a mechanical mount, a first setof three or more adjustable connectors coupling the scanner board to themechanical mount, and a first set of elastic members between themechanical mount and the scanner board and sleeved on the first set ofthree or more adjustable connectors, where the first set of three ormore adjustable connectors may be adjustable to adjust a position of thescanner board such that the light beam scanned by the optical scannermay be received by the galvo mirror.

According to certain embodiments, a LiDAR system may include a chassisand a plurality of optical transceivers mounted on the chassis, whereeach optical transceiver of the plurality of optical transceivers may beconfigured to transmit light to and receive light from a respectivefield of view. Each optical transceiver of the plurality of opticaltransceivers may include a galvo mirror assembly. The galvo mirrorassembly may include a mirror holder including a handle and a galvomirror for receiving and reflecting a light beam; a galvo mirror mountdetachably mounted on the chassis and including a recess for receivingthe handle of the mirror holder; two compression springs coupled to thehandle of the mirror holder and the galvo mirror mount; two set screwsin contact with the handle of the mirror holder and at least partiallyin the galvo mirror mount; and a galvo motor in the galvo mirror mountand configured to rotate the mirror holder. The two set screws may beindividually adjustable to change a compression force applied to atleast one of the two compression springs and a tilt angle of the mirrorholder (and the galvo mirror) with respect to a vertical direction.

In some embodiments of the LiDAR system, the handle of the mirror holdermay include a bottom portion and a top portion, where the bottom portionmay be characterized by a first diameter larger than a second diameterof the top portion but smaller than a third diameter of the recess inthe galvo mirror mount. The bottom portion of the handle of the mirrorholder may be in the recess. The galvo mirror mount may include a bodythat includes the recess and a cap on the recess. The cap may include anaperture characterized by a fourth diameter larger than the seconddiameter but smaller than the first diameter, where the top portion ofthe handle of the mirror holder may extend through the cap. The twocompression springs and the two set screws may be at least partiallywithin the cap. In some embodiments, the cap may include a first halfand a second half, the first half and the second half of the cap may bedetachably coupled to the body, the two set screws may be at leastpartially within the first half of the cap, and the two compressionsprings may be at least partially within the second half of the cap.

Techniques disclosed herein offer various improvements and advantagesover existing techniques. For example, the kinematic mounts according tosome embodiments may provide multiple (e.g., 1 to 5) degrees of freedomfor adjusting the orientations and/or locations of the MEMS devices,galvo mirrors, lenses, photodetectors, and the like. The kinematicmounts may be used to compensate for the tolerance of mechanical partsand the stack up tolerance during assembly. The kinematic mounts havesmall dimensions and thus can be used in LiDAR systems that have smallsizes and limited space.

The terms and expressions that have been employed are used as terms ofdescription and not of limitation, and there is no intention in the useof such terms and expressions of excluding any equivalents of thefeatures shown and described or portions thereof. It is recognized,however, that various modifications are possible within the scope of thesystems and methods claimed. Thus, it should be understood that,although the present system and methods have been specifically disclosedby examples and optional features, modification and variation of theconcepts herein disclosed should be recognized by those skilled in theart, and that such modifications and variations are considered to bewithin the scope of the systems and methods as defined by the appendedclaims.

This summary is not intended to identify key or essential features ofthe claimed subject matter, nor is it intended to be used in isolationto determine the scope of the claimed subject matter. The subject mattershould be understood by reference to appropriate portions of the entirespecification of this disclosure, any or all drawings, and each claim.

The foregoing, together with other features and examples, will bedescribed in more detail below in the following specification, claims,and accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects and features of the various embodiments will be more apparent bydescribing examples with reference to the accompanying drawings, inwhich like reference numerals refer to like components or partsthroughout the drawings.

FIG. 1 illustrates an example of a vehicle including a LiDAR-baseddetection system according to certain embodiments.

FIGS. 2A and 2B illustrated an example of a LiDAR system according tocertain embodiments. FIG. 2A illustrates an example of a beam steeringoperation by the LiDAR system. FIG. 2B illustrates an example of areturn beam detection operation by the LiDAR system.

FIG. 3 is a simplified diagram of an example of an optical subsystem ina LiDAR system according to certain embodiments.

FIG. 4 is a perspective view of an example of a LiDAR system accordingto certain embodiments.

FIG. 5A illustrates an example of a kinematic mount for a MEMS device ina LiDAR system according to certain embodiments. FIG. 5B is an explodedview of an example of a kinematic mount for a MEMS device in a LiDARsystem according to certain embodiments.

FIG. 6 shows an example of a bracket according to certain embodiments.

FIG. 7 shows an example of a MEMS board according to certainembodiments.

FIG. 8 shows an example of a kinematic mount according to certainembodiments.

FIG. 9 illustrates an example of an extending arm according to certainembodiments.

FIG. 10 shows an example of a kinematic mount in the assembled stateaccording to certain embodiments.

FIG. 11 is a perspective view of a kinematic mount for illustrating themovement of a MEMS board with respect to an extending arm.

FIG. 12A is a cross-sectional view of a kinematic mount. FIG. 12B is atop view of the kinematic mount shown in FIG. 12A. FIG. 12C illustratesthe range of roll angle adjustment in the kinematic mount shown in FIG.12A.

FIG. 13A is a cross-sectional view of a kinematic mount. FIG. 13B is aside view of the kinematic mount shown in FIG. 13A. FIG. 13C illustratesthe range of pitch angle adjustment in the kinematic mount shown in FIG.13A.

FIG. 14 is an exploded view of an example of a kinematic mount accordingto certain embodiments.

FIG. 15A is a side view of a kinematic mount according to certainembodiments. FIG. 15B is a cross-sectional view of the kinematic mountshown in FIG. 15A. FIG. 15C illustrates the range of yaw angleadjustment in the kinematic mount shown in FIG. 15A.

FIG. 16 shows a perspective view of a mirror assembly according tocertain embodiments.

FIG. 17 shows an exploded view of the mirror assembly shown in FIG. 16.

FIG. 18 shows another perspective view of the mirror assembly shown inFIG. 16.

FIG. 19 illustrates a perspective view of an example of a mirrorassembly according to certain embodiments.

FIG. 20 illustrates a perspective view of the mirror assembly shown inFIG. 19.

FIG. 21 illustrates another perspective view of the mirror assemblyshown in FIG. 19.

FIG. 22 illustrates a perspective view of the mirror assembly shown inFIG. 19.

FIG. 23A illustrates a side view of the mirror assembly shown in FIG.19. FIG. 23B illustrates the range of pitch angle adjustment in themirror assembly shown in FIG. 19.

FIG. 24A illustrates another side view of the mirror assembly shown inFIG. 19. FIG. 24B illustrates the range of roll angle adjustment in themirror assembly shown in FIG. 19.

FIG. 25 illustrates an example of a receiver unit according to certainembodiments.

FIGS. 26A and 26B illustrate an example of a carrier frame for mountinglenses and photodetectors according to certain embodiments.

FIGS. 27A and 27B illustrate an example of lens mount in differentperspective views according to certain embodiments.

FIG. 28 illustrates an example of a receiver unit in a perspective viewaccording to certain embodiments.

FIG. 29 illustrates an example of receiver unit in an exploded viewaccording to certain embodiments.

FIG. 30 illustrates an example of a board mount in a perspective viewaccording to certain embodiments.

DETAILED DESCRIPTION OF THE INVENTION

Techniques disclosed herein relate generally to light detection andranging (LiDAR) systems, and more specifically, to techniques foraccurately aligning components in a LiDAR systems. In particular,techniques disclosed herein relate to mechanical mounts with multiple(e.g., 1-5) degrees of freedom for adjusting positions of small opticalcomponents in a compact LiDAR system that has limited space. Variousinventive embodiments are described herein, including devices, units,subsystems, modules, systems, methods, and the like.

In a LiDAR system, the relative position or alignment of various opticalcomponents on the light path, such as light sources, lenses, reflectors,and photodetectors, may significantly impact the accuracy and otherperformance of the LiDAR system. For example, a small offset in theorientation of a beam steering mirror may cause a large offset in thescanning point in the far field, and thus inaccurate information may bemeasured for target points. Therefore, during assembly and maintenance,the optical components may need to be fine-tuned to align properly. Thefine-tuning of the optical components may be performed using mechanicalmounts with multiple degrees of freedom, such as translations in x, y,and z directions and rotations around x axis (pitch), around y axis(roll), and around z axis (yaw). Existing mechanical mounts withmultiple degrees of freedom may be complicate and bulky, or may lack thedesired degrees of freedom and/or accuracy. In a compact LiDAR system,such as a LiDAR system used in a vehicle, the distances between at leastsome optical components may be small. Therefore, the mechanical mountsfor the optical components may need to be small in order to fit in thecompact LiDAR system. Thus, existing mechanical mounts may not besuitable for use in compact LiDAR systems with limited space betweenoptical components.

According to certain embodiments disclosed herein, a LiDAR system mayinclude a chassis and a galvo mirror assembly. The galvo mirror assemblymay include a mirror holder including a handle and a galvo mirror forreceiving and reflecting a light beam; a galvo mirror mount detachablymounted on the chassis and including a recess for receiving the handleof the mirror holder; two elastic members coupled to the handle of themirror holder and the galvo mirror mount; two set screws in contact withthe handle of the mirror holder and at least partially in the galvomirror mount; and a galvo motor in the galvo mirror mount and configuredto rotate the mirror holder. The two set screws may be individuallyadjustable to change a compression force applied to at least one of thetwo elastic members and a tilt angle of the mirror holder (and the galvomirror) with respect to a vertical direction. In some embodiments, thetwo elastic members may include two compression springs, such as wavesprings, where each of the two compression springs may be characterizedby a spring constant greater than a threshold value.

In the following description, for the purposes of explanation, specificdetails are set forth in order to provide a thorough understanding ofexamples of the disclosure. It will be apparent that various examplesmay be practiced without these specific details. The ensuing descriptionprovides examples only, and is not intended to limit the scope,applicability, or configuration of the disclosure. Rather, the ensuingdescription of the examples will provide those skilled in the art withan enabling description for implementing an example. It should beunderstood that various changes may be made in the function andarrangement of elements without departing from the spirit and scope ofthe disclosure as set forth in the appended claims. The figures anddescription are not intended to be restrictive. Circuits, systems,networks, processes, and other components may be shown as components inblock diagram form in order not to obscure the examples in unnecessarydetail. In other instances, well-known circuits, processes, algorithms,structures, and techniques may be shown without unnecessary detail inorder to avoid obscuring the examples. The teachings disclosed hereincan also be applied to various types of applications such as mobileapplications, non-mobile application, desktop applications, webapplications, enterprise applications, and the like. Further, theteachings of this disclosure are not restricted to a particularoperating environment (e.g., operating systems, devices, platforms, andthe like) but instead can be applied to multiple different operatingenvironments.

Furthermore, examples may be implemented by hardware, software,firmware, middleware, microcode, hardware description languages, or anycombination thereof. When implemented in software, firmware, middlewareor microcode, the program code or code segments to perform the necessarytasks (e.g., a computer-program product) may be stored in amachine-readable medium. A processor(s) may perform the necessary tasks.

Also, it is noted that individual examples may be described as a processwhich is depicted as a flowchart, a flow diagram, a data flow diagram, astructure diagram, or a block diagram. Although a flowchart may describethe operations as a sequential process, many of the operations may beperformed in parallel or concurrently. In addition, the order of theoperations may be re-arranged. A process is terminated when itsoperations are completed, but could have additional steps not includedin a figure. A process may correspond to a method, a function, aprocedure, a subroutine, a subprogram, etc. When a process correspondsto a function, its termination may correspond to a return of thefunction to the calling function or the main function.

Where components are described as being “configured to” perform certainoperations, such configuration may be accomplished, for example, bydesigning electronic circuits or other hardware to perform theoperation, by programming or controlling electronic circuits (e.g.,microprocessors, or other suitable electronic circuits) to perform theoperation, or any combination thereof.

The word “example” or “exemplary” is used herein to mean “serving as anexample, instance, or illustration.” Any embodiment or design describedherein as “exemplary” or “example” is not necessarily to be construed aspreferred or advantageous over other embodiments or designs.

I. Lidar System

A LiDAR system is an active remote sensing system that can be used toobtain the range from a transmitter to one or more points on a target ina field of view. A LiDAR system uses a light beam, typically a laserbeam, to illuminate the one or more points on the target. Compared withother light sources, a laser beam may propagate over long distanceswithout spreading significantly (highly collimated), and can be focusedto small spots so as to deliver high optical power densities and providefine resolution. The laser beam may be modulated such that thetransmitted laser beam may include a series of pulses. The transmittedlaser beam may be directed to a point on the target, which may reflector scatter the transmitted laser beam. The laser beam reflected orscattered from the point on the target to the LiDAR system can bemeasured, and the time of flight (ToF) from the time a pulse of thetransmitted light beam is transmitted from the transmitter to the timethe pulse arrives at a receiver near the transmitter or at a knownlocation may be measured. The range from the transmitter to the point onthe target may then be determined by, for example, r=c×t/2, where r isthe range from the transmitter to the point on the target, c is thespeed of light in free space, and t is the ToF of the pulse of the lightbeam from the transmitter to the receiver.

A LiDAR system may include, for example, a single-point scanning systemor a single-pulse flash system. A single-point scanning system may use ascanner to direct a pulsed light beam (e.g., pulsed laser beam) to asingle point in the field of view at a time and measure the reflected orbackscattered light beam with a photodetector. The scanner may thenslightly tilt the pulsed light beam to illuminate the next point, andthe process may be repeated to scan the full field of view. A flashLiDAR system, on the other hand, may transmit a wider-spread light beamand use a two dimensional array of photodiodes (e.g., a focal-planearray (FPA)) to measure the reflected or backscattered light at severalpoints simultaneously. Due to the wider beam spread, a flash LiDARsystem may scan a field of view faster than a single-point scanningsystem, but may need a much more powerful light source to illuminate alarger area.

FIG. 1 illustrates an example of a vehicle 100 including a LiDAR-baseddetection system according to certain embodiments. Vehicle 100 mayinclude a LiDAR system 102. LiDAR system 102 may allow vehicle 100 toperform object detection and ranging in the surrounding environment.Based on the result of the object detection and ranging, vehicle 100may, for example, automatically maneuver (with little or no humanintervention) to avoid a collision with an object in the environment.LiDAR system 102 may include a transmitter 104 and a receiver 106.Transmitter 104 may direct one or more light pulses 108 (or a frequencymodulated continuous wave (FMCW) light signal, an amplitude modulatedcontinuous wave (AMCW) light signal, etc.), at various directions atdifferent times according to a suitable scanning pattern, while receiver106 may detect returned light pulses 110 which may be portions oftransmitted light pulses 108 that are reflected or scattered by one ormore areas on one or more objects. LiDAR system 102 may detect theobject based on the detected light pulses 110, and may also determine arange (e.g., a distance) of each area on the detected objects based on atime difference between the transmission of a light pulse 108 and thereception of a corresponding light pulse 110, which is referred to asthe time of flight. Each area on a detected object may be represented bya data point that is associated with a 2-D or 3-D direction and distancewith respect to LiDAR system 102.

The above-described operations can be repeated rapidly for manydifferent directions. For example, the light pulses can be scanned usingvarious scanning mechanisms (e.g., spinning mirrors or MEMS devices)according to a one-dimensional or two-dimensional scan pattern fortwo-dimensional or three-dimensional detection and ranging. Thecollection of the data points in the 2-D or 3-D space may form a “pointcloud,” which may indicate, for example, the direction, distance, shape,and dimensions of a detected object relative to the LiDAR system.

In the example shown in FIG. 1, LiDAR system 102 may transmit lightpulse 108 in a direction directly in front of vehicle 100 at time T1 andreceive a returned light pulse 110 that is reflected by an object 112(e.g., another vehicle) at time T2. Based on the detection of lightpulse 110, LiDAR system 102 may determine that object 112 is directly infront of vehicle 100. In addition, based on the time difference betweenT1 and T2, LiDAR system 102 may determine a distance 114 between vehicle100 and object 112. LiDAR system 102 may also determine other usefulinformation, such as a relative speed and/or acceleration between twovehicles and/or the dimensions of the detected object (e.g., the widthor height of the object), based on additional light pulses detected. Assuch, vehicle 100 may be able to adjust its speed (e.g., slowing down,accelerating, or stopping) to avoid collision with other objects, or maybe able to control other systems (e.g., adaptive cruise control,emergency brake assist, anti-lock braking systems, or the like) based onthe detection and ranging of objects by LiDAR system 102.

FIG. 2A and FIG. 2B illustrate simplified block diagram of an example ofa LiDAR module 200 according to certain embodiments. LiDAR module 200may be an example of LiDAR system 102, and may include a transmitter202, a receiver 204, and a LiDAR controller 206 that controls theoperations of transmitter 202 and receiver 204. Transmitter 202 mayinclude a light source 208 and a collimator lens 210, whereas receiver204 may include a lens 214 and a photodetector 216. LiDAR module 200 mayfurther include a mirror assembly 212 and a beam deflector 213. In someembodiments, transmitter 202 and receiver 204 may be configured to sharemirror assembly 212 to perform light steering and detecting operation,with beam deflector 213 configured to reflect incident light reflectedby mirror assembly 212 to receiver 204. In some embodiments, beamdeflector 213 may be shared by transmitter 202 and receiver 204, wherelight from light source 208 and reflected by mirror assembly 212 may befurther reflected by beam deflector 213, while the returned beam may bedeflected by beam deflector 213 to lens 214 and photodetector 216.

FIG. 2A illustrates an example of a beam steering operation by LiDARmodule 200. To project light, LiDAR controller 206 can control lightsource 208 to transmit a light beam 218 (e.g., light pulses 108, an FMCWlight signal, an AMCW light signal, etc.). Light beam 218 may divergeupon leaving light source 208 and may be collimated by collimator lens210. Collimated light beam 218 may propagate with substantially the samebeam size.

Collimated light beam 218 may be incident upon mirror assembly 212,which can reflect and steer the light beam along an output projectionpath 219 towards a field of interest, such as object 112. Mirrorassembly 212 may include one or more rotatable mirrors, such as aone-dimensional or two-dimensional array of micro-mirrors. Mirrorassembly 212 may also include one or more actuators (not shown in FIG.2A) to rotate the rotatable mirrors. The actuators may rotate therotatable mirrors around a first axis 222, and/or may rotate therotatable mirrors around a second axis 226. The rotation around firstaxis 222 may change a first angle 224 (e.g., longitude angle) of outputprojection path 219 with respect to a first dimension (e.g., thex-axis), whereas the rotation around second axis 226 may change a secondangle 228 (e.g., altitude angle) of output projection path 219 withrespect to a second dimension (e.g., the y-axis). LiDAR controller 206may control the actuators to produce different combinations of angles ofrotation around first axis 222 and second axis 226 such that themovement of output projection path 219 can follow a scanning pattern232. A range 234 of movement of output projection path 219 along thex-axis, as well as a range 238 of movement of output projection path 219along the y-axis, can define a FOV. An object within the FOV, such asobject 112, can receive and reflect collimated light beam 218 to formreflected or returned light signal, which can be received by receiver204.

FIG. 2B illustrates an example of a return beam detection operation byLiDAR module 200. LiDAR controller 206 can select an incident lightdirection 239 for detection of incident light by receiver 204. Theselection can be based on setting the angles of rotation of therotatable mirrors of mirror assembly 212, such that only light beam 220propagating along light direction 239 gets reflected to beam deflector213, which can then divert light beam 220 to photodetector 216 viacollimator lens 214. Photodetector 216 may include any suitablehigh-speed detector that can detect light pulses in the workingwavelength of the LiDAR system, such as a PIN photodiode, a siliconphotomultiplier (SiPM) sensor, or an InGaAs avalanche photodetector.With such arrangements, receiver 204 can selectively receive signalsthat are relevant for the ranging/imaging of a target object, such aslight pulse 110 generated by the reflection of collimated light beam 218by object 112, and not to receive other signals. As a result, the effectof environment disturbance on the ranging/imaging of the object can bereduced, and the system performance can be improved.

FIG. 3 is a simplified block diagram of an example of an opticalsubsystem 300 in a LiDAR system, such as LiDAR system 102 shown in FIG.1, according to certain embodiments. In some embodiments, a plurality ofoptical subsystems 300 can be integrated into the LiDAR system toachieve, for example, 360° coverage in the transverse plane. In oneexample, a LiDAR system may include eight optical subsystems 300distributed around a circle, where each optical subsystem 300 may have afield of view about 45° in the transverse plane.

In the example shown in FIG. 3, optical subsystem 300 may include alight source 310, such as a laser (e.g., a pulsed laser diode). A lightbeam 312 emitted by light source 310 may be collimated by a collimationlens 320. The collimated light beam 322 may be incident on a firstdeflector 330, which may be stationary or may rotate in at least onedimension such that collimated light beam 322 may at least be deflectedby first deflector 330 towards, for example, different y locations.Collimated light beam 332 deflected by first deflector 330 may befurther deflected by a second deflector 340, which may be stationary ormay rotate in at least one dimension. For example, second deflector 340may rotate and deflect collimated light beam 332 towards different xlocations. Collimated light beam 342 deflected by second deflector 340may reach a target point at a desired (x, y) location on a target object305. As such, first deflector 330 and second deflector 340 may, alone orin combination, scan the collimated light beam in two dimensions todifferent (x, y) locations in a far field.

Target object 305 may reflect collimated light beam 342 by specularreflection or diffuse reflection. At least a portion of the reflectedlight 302 may reach second deflector 340 and may be deflected by seconddeflector 340 as a light beam 344 towards a third deflector 350. Thirddeflector 350 may deflect light beam 344 as a light beam 352 towards areceiver, which may include a lens 360 and a photodetector 370. Lens 360may focus light beam 352 as a light beam 362 onto a location onphotodetector 370, which may include a single photodetector or an arrayof photodetectors. Photodetector 370 may be any suitable high-speeddetector that can detect light pulses in the working wavelength of theLiDAR system, such as a PIN photodiode, a silicon photomultiplier (SiPM)sensor, or an InGaAs avalanche photodetector. In some embodiments, oneor more other deflectors may be used in the optical path to change thepropagation direction of the light beam (e.g., fold the light beam) suchthat the size of optical subsystem 300 may be reduced or minimizedwithout impacting the performance of the LiDAR system. For example, insome embodiments, a fourth deflector may be placed between thirddeflector 350 and lens 360, such that lens 360 and photodetector 370 maybe placed in desired locations in optical subsystem 300.

The light deflectors described above may be implemented using, forexample, a micro-mirror array, a galvo mirror, a stationary mirror, agrating, or the like. In one example implementation, first deflector 330may include a micro-mirror array, second deflector 340 may include agalvo mirror, and third deflector 350 and other deflectors may includestationary mirrors. A micro-mirror array can have an array ofmicro-mirror assemblies, with each micro-mirror assembly having amovable micro-mirror and an actuator (or multiple actuators). Themicro-mirrors and actuators can be formed as a microelectromechanicalsystem (MEMS) on a semiconductor substrate, which may allow theintegration of the MEMS with other circuitries (e.g., controller,interface circuits, etc.) on the semiconductor substrate.

The optical components in a LiDAR system, such as the light deflectorsdescribed above, may need to be installed on or held by mechanicalstructures such that the optical components can be securely placed indesired locations and aligned with each other. The mechanical structuresmay need to be small to fit in the optical subsystem and may need to beconfigured such that they may not obstruct the light path. A lightsteering system implemented using light deflectors, such as MEMS orother mirrors, and other optical components may be sensitive toalignment errors caused by, for example, manufacturing tolerance of theoptical components and the mechanical structures, assemble tolerance, oreven the unevenness in the thickness of the glue used to install theoptical components on the mechanical structures. The combination of thealignment errors of the optical components may cause a large degradationof the performance (e.g., accuracy) of the overall LiDAR system. Thus,the mechanical structures may need to have multiple degrees of freedom,such as translations in x, y, and z directions and rotations around xaxis (pitch), around y axis (roll), and around z axis (yaw), such thatthe mechanical structures may be adjusted to fine tune the position ofthe optical components mounted on the mechanical structures.

FIG. 4 is a perspective view of an example of a LiDAR system 400according to certain embodiments. FIG. 4 illustrates various mechanicalstructures for installing optical components in the optical subsystemdescribed above with respect to, for example, FIG. 3. For example, LiDARsystem 400 may include a first unit 410 for mounting optical components,such as light source 310, collimation lens 320, and first deflector 330(e.g., a MEMS mirror array). In the example shown in FIG. 4, first unit410 may include an extending arm and a MEMS mount adjustably connectedto the extending arm, where light source 310 and collimation lens 320may be installed on the extending arm to form a coaxial subsystem, whilefirst deflector 330 may be mounted on the MEMS mount. Thus, the positionof first deflector 330 with respect to light source 310 and collimationlens 320 may be fine-tuned by adjusting the MEMS mount. In many cases,the MEMS mount may need to be adjusted with multiple degrees of freedom,including translations and rotations.

LiDAR system 400 may also include a second unit 420 for mounting seconddeflector 340 (e.g., a galvo mirror), which may be controlled to rotate,thus directing the light reflected from first deflector away from LiDARsystem 400 and toward target object 305, as described above. Lightdeflected by first deflector 330 may be incident on second deflector 340at different vertical locations, and second deflector 340 may have arectangular shape that is elongated in the vertical direction to receivethe deflected light. As also described above with respect to FIG. 3, insome embodiments, second deflector 340 may also be used to directreturned light reflected by target object 305 to third deflector 350 forsending to lens 360 and photodetector 370. In some embodiments, seconddeflector 340 may include a mirror assembly, where at least a portion ofthe mirror assembly may be used to direct the scanning light beam and atleast a portion of the mirror assembly may be used to direct thereturned light beam. Because of the elongated shape of second deflector340 and the ability to rotate according to control signals, second unit420 may only need to be adjusted to tune the angle of second deflector340 with respect to the vertical direction.

Third deflector 350 may be mounted on a third unit 430, which may beadjacent to the MEMS mount in first unit 410. Third deflector 350 maydeflect the returned light beam from second deflector 340 to lens 360and photodetector 370, which may both be installed on a fourth unit 440that includes multiple mounts for mounting one or more lenses 360 andone or more photodetectors 370. The positions of third deflector 350,lens 360, and photodetector 370 may also need to be tuned to align witheach other and second deflector 340.

First unit 410, second unit 420, third unit 430, and fourth unit 440 maybe secured on a chassis 450. Additional support and securing structuresmay be provided in addition to units 410, 420, 430, and 440. Forexample, in some embodiments, the returned light deflected by thirddeflector 350 may be further folded by a fourth deflector 460 before thereturned light reaches lens 360. More details of these units may bedescribed below. It is noted that the structure shown in FIG. 4 anddescribed above and below is for illustration purposes only, and is notintended to be limiting. In light of the teaching of the presentdisclosure, those skilled in the art may contemplate other structuresfor the LiDAR system. For example, the units described above may bearranged differently and may include components or structures differentfrom those described herein, and other units may be included in otherembodiments.

As described above and below, the alignment and positions of the opticalcomponents in the LiDAR system may significantly impact the accuracy andother performance of the LiDAR system. Misalignment may be caused byvarious reasons, such as manufacturing tolerance, assembly tolerance,distortion of the components, and the like. Thus, it may be desirablethat the mechanical structures for mounting the optical components canbe adjusted to align or re-align these components at least during theassembly and maintenance. However, as shown by FIG. 4, LiDAR system 400may include many optical components, mechanical structures, andelectrical devices in a compact configuration, where light may be foldedmultiple times to reduce the physical dimension of the overall systemand the mechanical structures may not obstruct the transmitted orreceived light. Due to the dimensional constraint, it may be challengingto include mechanical structures that have small sizes while providingthe desired degrees of freedom for tuning as many stages with multipledegrees of freedom are usually bulky. Techniques disclosed herein, suchas the mechanical designs described in details below, can be used toimplement compact mechanical structures that can be adjusted with thedesired degrees of freedom for tuning the position of the opticalcomponents.

II. Mems Mount

FIG. 5A illustrates an example of a kinematic mount 500 for a MEMSdevice in a LiDAR system according to certain embodiments. FIG. 5B is anexploded view of kinematic mount 500. Kinematic mount 500 may be anexample of first unit 410 shown in FIG. 4. Kinematic mount 500 shown inFIG. 5A is in the assembled state, and may include a bracket 510, a MEMSboard 520, a mount 530, and an extending arm 540. When assembled, aplurality of connectors 550 may connect bracket 510, MEMS board 520, andmount 530, details of which are described below. A plurality ofconnectors 570 may be used to connect mount 530 and extending arm 540,details of which are described below.

In some embodiments, each connector 550 may include a screw, which maybe inserted into corresponding bores formed in bracket 510 and MEMSboard 520, and a threaded hole formed in mount 530 to connect bracket510, MEMS board 520, and mount 530 together. In the assembled state,MEMS board 520 may be interposed between bracket 510 and mount 530. Insome embodiments, MEMS board 520 may be configured to install thereonMEMS (including micro-mirror arrays) and semiconductor integratedcircuits (not shown). An elastic member 560 (e.g., a wave spring) may besleeved on each connector 550 and disposed between MEMS board 520 andmount 530 after kinematic mount 500 is assembled. The number of elasticmembers 560 may be equal to that of connectors 550, such as three ormore. Each elastic member 560 may include a first end 562 and a secondend 564. Elastic member 560 positioned between MEMS board 520 and mount530 may push against MEMS board 520 with first end 562, and push againstmount 530 with second end 564. The length of elastic member 560 fromfirst end 562 to second end 564 may be adjusted by turning connector 550into or out of the threaded hole in mount 530, thereby adjusting theposition of MEMS board 520 with respect to mount 530 that is in turnconnected to extending arm 540, which may be fixed with respect to, forexample, chassis 450.

Similarly, each connector 570 may include a screw, which may be insertedinto a bore formed in extending arm 540 and a threaded hole formed inmount 530 to connect extending arm 540 and mount 530 together. Anelastic member 580 (e.g., a wave spring) may be sleeved on eachconnector 570 and disposed between extending arm 540 and mount 530 afterkinematic mount 500 is assembled. The number of elastic members 580 maybe equal to that of connectors 570, such as two or more. Each elasticmember 580 may include a first end pushing against mount 530 and asecond end pushing against extending arm 540. The length of elasticmember 580 from the first end to the second end may be adjusted byturning connector 570 into or out of the threaded hole in mount 530,thereby adjusting the position of mount 530 (and thus MEMS board 520)with respect to extending arm 540. More details of these components andunits are described below.

FIG. 6 illustrates an example of bracket 510 according to certainembodiments. Bracket 510 may have a substantially rectangular frameshape. In some embodiments, bracket 510 may provide accommodation spacefor devices mounted on MEMS board 520, such as certain electricalcircuits for driving the MEMS device. MEMS board 520 can be thin andfragile. Bracket 510 may strengthen MEMS board 520 and prevent MEMSboard 520 from bending, warping, or wearing. In some embodiments,bracket 510 may not be used when MEMS board 520 has sufficient strength.Those skilled in the art should understand that the shape of bracket 510is not limited to rectangular. Other shapes can be used, such as atriangle, circle, hexagon, and the like.

In the example shown in FIG. 6, bracket 510 has a first side 514 and asecond side 516 opposite to first side 514. When assembled, second side516 of bracket 510 may face MEMS board 520. In other words, second side516 is closer to MEMS board 520 than first side 514. In someembodiments, bracket 510 may include studs 512 on second side 516. Studs512 may be perpendicular to second side 516 and may have a heightdetermined according to specific application scenarios. The number ofstuds 512 may be equal to that of connectors 550, such as three or more.Each stud 512 has a first surface 512 a. In some embodiments, whenassembled, first surface 512 a of stud 512 may be positioned to pushagainst MEMS board 520. In some embodiments, stud 512 may be a separateelement from bracket 510. In some embodiments, bracket 510 mayalternatively or additionally include ancillary elastic members (notshown in FIG. 6). The ancillary elastic members may be similar toelastic member 560 shown in FIG. 5. When assembled, each ancillaryelastic member may be sleeved on a connector 550 and may be disposedbetween bracket 510 and MEMS board 520. For example, the ancillaryelastic member may push against first surface 512 a of stud 512 (orsecond side 516 of bracket 510) with one end, and push against MEMSboard 520 with the other end. As shown in FIG. 6, a bore 515 may extendthrough stud 512 to provide the passage for connector 550 to connectbracket 510 and MEMS board 520. In some embodiments, a diameter of bore515 may be larger than that of connector 550 to facilitate assembly andadjustment. In some embodiments, studs 512 and/or the ancillary elasticmembers may not be used.

FIG. 7 illustrates an example of MEMS board 520 according to certainembodiments. MEMS board 520 may have a rectangular shape or any othersuitable shape, such as a triangle, circle, hexagon, and the like. MEMSboard 520 may have a first surface 526 and a second surface 528 oppositeto first surface 526. MEMS board 520 may include MEMS device 522 mountedon second surface 528. MEMS board 520 may have bores 524 formed therein,which may be aligned with bores 515 in bracket 510 when assembled. Thenumber of bores 524 may be equal to the number of connectors 550, suchas three or more. As shown in FIG. 5A, each connector 550 may extendthrough the corresponding bore 524 when assembled.

FIG. 8 illustrates an example of mount 530 according to certainembodiments. Mount 530 may have a substantially rectangular shape or anyother suitable shape, with the center portion being removed to allowlight to reach MEMS device 522 and to provide accommodation space forMEMS device 522 or other components on MEMS board 520 when assembled. Asshown in FIG. 8, mount 530 may have a certain thickness such that boresor threaded holes may be formed in mount 530, while mount 530 can stillhave the desired mechanical strength. Mount 530 may have a first surface536 and a second surface 538 opposite to the first surface 536. Mount530 may include bores 532 extending in a direction perpendicular tofirst surface 536 or second surface 538 of mount 530. The number ofbores 532 may be equal to that of connectors 550, such as three or more.In some embodiments, bores 532 may be through holes to receiveconnectors 550 as shown in FIG. 5A. In some embodiments, each bore 532may be a blind hole having an opening only on second surface 538 ofmount 530. In some embodiments, each bore 532 may include two sections,where one section may be larger and unthreaded to form a receptacle forelastic member 560, while the second section may have a smaller diameterand may be threaded to receive connector 550 (e.g., a screw) and holdconnector 550 in place. When assembled, each elastic member 560 as shownin FIGS. 5A and 5B may be disposed between MEMS board 520 and mount 530(e.g., partially within the receptacle), and may push against mount 530with one end and push against MEMS board 520 with the other end.

As shown in FIG. 8, mount 530 may have a first side 531 perpendicular tofirst surface 536 and/or second surface 538 of mount 530. Mount 530 mayinclude bores 534 on first side 531 and extended in a directionperpendicular to first side 531 of mount 530. As illustrated in theexample, each bore 534 may include two sections, where one section maybe larger and unthreaded to form a receptacle for elastic member 580,while the second section may have a smaller diameter and may be threadedto receive connector 570 and hold connector 570 in place. The number ofbores 534 may be equal to that of connectors 570, such as two or more.

FIG. 9 illustrates an example of extending arm 540 according to certainembodiments. Extending arm 540 may have an elongated shape, and may havea first end 542 proximate to the mount 530 when assembled, and a secondend 544 opposite to first end 542. As illustrated, extending arm 540 mayinclude two or more bores 546 extending in a direction perpendicular tothe elongated surface of extending arm 540. The number of bores 546 maybe equal to the number of connectors 570, such as two or more. As shownin FIGS. 5A and 5B, a connector 570 may pass through a bore 546 inextending arm 540 and may be inserted into a bore 534 in mount 530 toconnect extending arm 540 to mount 530. An elastic member 580 may besleeved on connector 570 and may be disposed between mount 530 and firstend 542 of extending arm 540 (e.g., partially with the receptacle ofbore 534). Elastic member 580 may push against mount 530 with the firstend, and push against extending arm 540 with the second end. Turningconnector 570 (e.g., a screw) may compress or relax elastic member 580,thereby adjusting the position of mount 530 (and thus MEMS board 520)with respect to extending arm 540.

Kinematic mount 500 described above may provide at least five degrees offreedom for adjusting MEMS board 520 with respect to extending arm 540,which may be fixed to chassis 450 described above. As described above,optical components such as light source 310 and collimation lens 320 maybe installed on second end 544 of extending arm 540. Thus, aligning MEMSboard 520 may align MEMS device 522 (e.g., first deflector 330) withlight source 310 and collimation lens 320 installed on extending arm540.

FIG. 10 illustrates an example of kinematic mount 500 in the assembledstate according to certain embodiments. For convenience of showingmovement of MEMS board 520 with respect to extending arm 540, aDescartes coordinate system is shown in FIG. 10, where first surface 526or second surface 528 of MEMS board 520 may be in the x-y plane and thedirection perpendicular to first surface 526 or second surface 528 ofMEMS board 520 may be the z direction. Thus, the elongated surface ofextending arm 540 may be in the x-z plane. In some embodiments,kinematic mount 500 can allow translations of MEMS board 520 in the ydirection and the z direction with respect to extending arm 540.Kinematic mount 500 may also facilitate rotations of MEMS board 520around x, y and z axes with respect to extending arm 540. Forconvenience of illustration and description, the rotation angle around xaxis may be referred to as the pitch angle, the rotation angle aroundthe y axis may be referred to as the roll angle, and the rotation anglearound the z axis may be referred to as the yaw angle. Details of thetranslations and rotations of MEMS board 520 are described below.

FIG. 11 is another perspective view of kinematic mount 500 forillustrating the movement of MEMS board 520 with respect to extendingarm 540. In the example illustrated in FIG. 11, the position of MEMSboard 520 may be tuned by adjusting connectors 550 a, 550 b, 550 c, 550d, 570 a, and 570 b. For example, when all four connectors 550 a, 550 b,550 c, and 550 d are driven in a first direction, MEMS board 520 maymove along z axis toward the mount 530. In some embodiments, the firstdirection may be the clockwise direction. When all four connectors 550a, 550 b, 550 c, and 550 d are driven in a second direction opposite tothe first direction, MEMS board 520 may move in −z direction away frommount 530. In some embodiments, the second direction may be thecounterclockwise direction. It is noted that, in some embodiments, threeor more connectors 550 may be used to uniquely define a plane for MEMSboard 520. Similarly, two or more connectors 570 may be used to adjustthe yaw angle and the y position of MEMS board 520 with respect toextending arm 540.

FIGS. 12A and 12B illustrate the translations of MEMS board 520 (e.g.,in the z directions) and the rotations of MEMS board 520, for example,with respect to the y axis (roll angle) according to some embodiments.FIG. 12A is a cross-sectional view of kinematic mount 500 along a lineG-G in FIG. 12B. FIG. 12B is a top view of kinematic mount 500. Asillustrated, when connectors 550 a and 550 c (and connectors 550 b and550 d that are not shown in FIGS. 12A and 12B) are driven in the samedirection, MEMS board 520 may move in the +z or −z direction. Whenconnectors 550 c and 550 d are driven in a first direction whileconnectors 550 a and 550 b are not driven or are driven in an oppositedirection, or when connectors 550 a and 550 b are driven in a firstdirection while connectors 550 c and 550 d are not driven or are drivenin an opposite direction, MEMS board 520 may rotate around the y axis tochange the roll angle of MEMS board 520.

FIG. 12C illustrates the range of roll angle adjustment in kinematicmount 500. For convenience and clarity, FIG. 12C may not show allcomponents of kinematic mount 500, and relevant components involved mayhave been simplified. As shown in FIG. 12C, bracket 510 may have alength d1 between the centers of connectors 550 a and 550 c. Connector550 c may be turned to apply the maximum compression force on elasticmember 560 c, while connector 550 a may be turned to apply the minimumcompression force on elastic member 560 a. As such, MEMS board 520 mayrotate around the y axis, and the difference between the maximumdistance between MEMS board 520 and mount 530 and the minimum distancebetween MEMS board 520 and mount 530 may be about h as shown in FIG.12C. Therefore, the maximum roll angle α around y axis may be determinedby the following equation:

$\alpha = {{\arctan\left( \frac{h}{d\; 1} \right)}.}$

For example, if d1 is about 32 mm and h is about 2.5 mm, the maximumroll angle adjustment may be about +4.5°. In another example, connector550 a may be turned to apply the maximum compression force on elasticmember 560 a, while connector 550 c may be turned to apply the minimumcompression force on elastic member 560 c, MEMS board 520 may rotatearound y axis in an opposite direction. Therefore, the range of the rollangle adjustment may be between, for example, about −4.5° and about+4.5°.

In some other examples, a single connector 550 a, 550 b, 550 c, or 550 dmay be driven, such that the distance between MEMS board 520 and mount530 at the location of the single connector 550 a, 550 b, 550 c, or 550d that is driven may be reduced or increased. In such cases, MEMS board520 may rotate around both x axis and y axis to change the pitch angleand the roll angle at the same time. For example, as shown in FIG. 11,connector 550 a can be driven such that the distance between MEMS board520 and mount 530 at the position of connector 550 a may be reduced,MEMS board 520 may pivot around connector 550 d to change the pitchangle around x axis and the roll angle around y axis. Any one or more ofconnectors 550 a, 550 b, 550 c, and 550 d may be driven to achieve thedesired orientation of MEMS board 520 with respect to extending arm 540.

FIGS. 13A and 13B illustrate the translations of MEMS board 520 (e.g.,in the z direction) and the rotations of MEMS board 520, for example,with respect to the x axis (pitch angle) according to some embodiments.FIG. 13A is a cross-sectional view of kinematic mount 500 along a lineB-B in FIG. 13B. FIG. 13B is a side view of kinematic mount 500. Asillustrated, when connectors 550 c and 550 d and connectors 550 a and550 b (which are not shown in FIG. 13A) are driven in the samedirection, MEMS board 520 may move in the +z or −z direction. Whenconnectors 550 c and 550 a are driven in a first direction whileconnectors 550 d and 550 b are not driven or are driven in an oppositedirection, or when connectors 550 d and 550 b are driven in a firstdirection while connectors 550 c and 550 a are not driven or are drivenin an opposite direction, MEMS board 520 may rotate around the x axis tochange the pitch angle of MEMS board 520.

FIG. 13C illustrates the range of pitch angle adjustment in kinematicmount 500. For convenience and clarity, FIG. 13C may not show allcomponents of kinematic mount 500, and relevant components involved mayhave been simplified. As shown in FIG. 13C, bracket 510 may have alength d2 between the centers of connectors 550 c and 550 d. Connector550 c may be turned to apply the maximum compression force on elasticmember 560 c, while connector 550 d may be turned to apply the minimumcompression force on elastic member 560 d. As such, MEMS board 520 mayrotate around the x axis, and the difference between the maximumdistance between MEMS board 520 and mount 530 and the minimum distancebetween MEMS board 520 and mount 530 may be about h as shown in FIG.13C. Therefore, the maximum pitch angle β around x axis may bedetermined by the following equation:

$\beta = {{\arctan\left( \frac{h}{d\; 2} \right)}.}$

For example, if d2 is about 28 mm and h is about 2.5 mm, the maximumroll angle adjustment may be about +5.1°. In another example, connector550 d may be turned to apply the maximum compression force on elasticmember 560 d, while connector 550 c may be turned to apply the minimumcompression force on elastic member 560 c, MEMS board 520 may rotatearound x axis in an opposite direction. Therefore, the range of thepitch angle adjustment may be between, for example, about −5.1° andabout +5.1°.

FIG. 14 is another exploded view of an example of kinematic mount 500according to certain embodiments. FIG. 14 illustrates the connectionbetween mount 530 and extending arm 540 using connectors 570 a and 570 band elastic members 580 a and 580 b. Connectors 570 a and 570 b andelastic members 580 a and 580 b may be used to adjust the translation ofMEMS board 520 in the y direction and the rotation of MEMS board 520with respect to z axis (the yaw angle).

FIGS. 15A and 15B illustrate the translations of MEMS board 520 (e.g.,in the y and z directions) and the rotation of MEMS board 520, forexample, with respect to the z axis (yaw angle) according to someembodiments. FIG. 15A is a side view of kinematic mount 500. FIG. 15B isa cross-sectional view of kinematic mount 500 along a line H-H in FIG.15A. As illustrated in FIG. 15A and described above with respect toFIGS. 13A and 13B, when connectors 550 a and 550 b and connectors 550 cand 550 d (which are not shown in FIGS. 15A-15B) are driven in the samedirection, MEMS board 520 may move in the +z or −z direction. Whenconnectors 550 a and 550 c are driven in a first direction whileconnectors 550 b and 550 d are not driven or are driven in an oppositedirection, or when connectors 550 b and 550 d are driven in a firstdirection while connectors 550 a and 550 c are not driven or are drivenin an opposite direction, MEMS board 520 may rotate around the x axis tochange the pitch angle of MEMS board 520.

As shown in FIG. 15B, when connectors 570 a and 570 b are driven in asame direction to compress or relax elastic members 580 a and 580 b,MEMS board 520 may move in the +y or −y direction with respect toextending arm 540. In addition, when connector 570 a is driven in afirst direction while connector 570 b is not driven or is driven in anopposite direction, or when connector 570 b is driven in a firstdirection while connector 570 a is not driven or is driven in anopposite direction, MEMS board 520 may rotate around the z axis tochange the yaw angle γ of MEMS board 520.

FIG. 15C illustrates the range of yaw angle adjustment in kinematicmount 500. For convenience and clarity, FIG. 15C may not show allcomponents of kinematic mount 500, and relevant components involved mayhave been simplified. As shown in FIG. 15C, connectors 570 a and 570 bmay be driven separately or concurrently to change the yaw angle γ ofmount 530 (and thus MEMS board 520) around the z axis. In the exampleshown in FIG. 15C, connector 570 b may be turned to apply the maximumcompression force on elastic member 580 b and connector 570 a may beturned to apply the minimum compression force on elastic member 580 a toachieve the maximum yaw angle γ adjustment. The achievable maximum yawangle γ adjustment may be determined based on the dimensions of bore 546in extending arm 540, the thickness of extending arm 540, and thediameter of connector 570 a or 570 b. In some embodiments, the yaw angleγ adjustment can be in the range of, for example, about −15° to about15°. In one example, the diameter of bore 546 is about 2.4 mm, thediameter of connector 570 a is about 2.0 mm, and the thickness ofextending arm 540 is about 1.8 mm, and thus the maximum yaw angle γadjustment between extending arm 540 and mount 530 is about 11.32°. Invarious embodiments, the maximum yaw angle γ adjustment may be changedby changing one or more of the dimensions of bore 546 in extending arm540, the thickness of extending arm 540, and the diameter of connector570 a or 570 b.

III. Galvo Mirror Assembly

FIGS. 16-18 illustrate an example of second unit 420. FIG. 16illustrates a perspective view of second unit 420 according to certainembodiments. As shown in FIG. 16, second unit 420 includes a bottomholder 1710, a mirror holder 1720 and a mirror mounted on the mirrorholder 1720 (e.g., second deflector 340). Mirror holder 1720 is securedto bottom holder 1710 by caps 1730 a-1730 b.

FIG. 17 illustrates an example of second unit 420 in an exploded view.In the example shown in FIG. 17, second unit 420 includes bottom holder1710, which has a receiving recess 1712 on a top portion of bottomholder 1710. Receiving recess 1712 has an opening 1714 on one side.Second unit 420 includes a mirror holder 1720. A mirror, such as seconddeflector 340 (e.g., a galvo mirror) is mounted on a top portion 1722 ofmirror holder 1720. A bottom portion 1724 of mirror holder 1720 isreceived in receiving recess 1712 of bottom holder 1710. In someembodiments, bottom holder 1710 and mirror holder 1720 have asubstantially cylinder shape. The diameter of receiving recess 1712 maybe larger than that of bottom portion 1724. As such, mirror holder 1720may be tilted with respect to bottom holder 1710 when assembled, toadjust the orientation of second deflector 340 on mirror holder 1720. Insome embodiments, the diameter of top portion 1722 is less than that ofbottom portion 1724 so as to form a shoulder 1726 at the interfacebetween top portion 1722 and bottom portion 1724. It is noted that theshape of bottom holder 1710 and that of mirror holder 1720 are notlimited to a cylinder shape.

Second unit 420 further includes a cap assembly including two caps 1730a and 1730 b to secure mirror holder 1720 in receiving recess 1712 ofbottom holder 1710. In some embodiments, caps 1730 a and 1730 b areapproximately in the shape of a half cylinder. Caps 1730 a and 1730 bcan be combined to form a substantially cylinder shape. At either sideof cap 1730 a, there is a bore 1733 formed through the thickness of cap1730 a. Cap 1730 a has two bores 1733. An ear portion 1716 is formed onthe top portion of bottom holder 1710 at either side of receiving recess1712. A bore 1715 is formed in each ear portion 1716. When cap 1730 a isassembled with bottom holder 1710, bore 1733 in cap 1730 a is alignedwith bore 1715 in ear portion 1716. Bolt 1739 can be inserted in bore1733 and bore 1715 to secure cap 1730 a to bottom holder 1710. In theassembled state, cap 1730 a may press against shoulder 1726 of mirrorholder 1720. In a similar way, cap 1730 b can be secured to bottomholder 1710 and presses against shoulder 1726 of mirror holder 1720. Inthis way, mirror holder 1720 is secured to bottom holder 1710. In someembodiments, bolt 1739 can be replaced by a screw, and bore 1715 in earportion 1716 may include threads to receive the screw. In someembodiments, an elastic member 1736 a (e.g., a wave spring) may bedisposed between a bottom surface of the cap 1730 a and shoulder 1726 ofmirror holder 1720. Similarly, an elastic member 1736 b (e.g., a wavespring) may be disposed between a bottom surface of cap 1730 b andshoulder 1726 of mirror holder 1720. Elastic members 1736 a and 1736 bmay provide elastic force between the caps 1730 a and 1730 b and theshoulder 1726. In some embodiments, elastic members 1736 a and 1736 bmay have sufficiently high elastic coefficients to prevent mirrors onmirror holder 1720 from swinging during operation of LiDAR system 102(as shown in FIG. 1). It is noted that the elastic members are notlimited to two elastic members 1736 a and 1736 b as shown in FIG. 17,and elastic members 1736 a and 1736 b are not limited to wave springs.For example, there may be two or more elastic members under each of caps1730 a and 1730 b.

As shown in FIG. 17, cap 1730 a includes two set screws 1732 that aredisposed in corresponding holes 1737 formed along a radial direction ofcap 1730 a. In some embodiments, holes 1737 are formed symmetricallyabout a radial direction of the cap 1730 a. For example, when cap 1730 ais in a half cylinder shape as shown in FIG. 17, holes 1737 may beformed along radial directions of cap 1730 a at the ⅛ circumference and⅜ circumference of cap 1730 a. Cap 1730 b includes two blind holes 1738that are formed along the radial direction of cap 1730 b at the ⅛circumference and ⅜ circumference of cap 1730 b. Blind holes 1738 areopened toward the center of cap 1730 b. When caps 1730 a and 1730 b areassembled, holes 1737 and holes 1738 are diametrically opposite to eachother. An elastic member 1734 (e.g., a wave spring) is received in hole1738. In the related state, elastic member 1734 is longer than the depthof hole 1738. In this way, elastic member 1734 may provide an elasticforce against mirror holder 1720 when the caps 1730 a and 1730 b areassembled with mirror holder 1720.

FIG. 18 shows another perspective view of second unit 420. As shown moreclearly in FIG. 18, set screw 1732 pushes against mirror holder 1720along a radial direction when assembled. Elastic member 1734 applies anelastic force to mirror holder 1720 from an opposite radial direction.In some embodiments, elastic member 1734 may have a sufficiently largespring coefficient to prevent second deflector 340 (e.g., a galvomirror) mounted on top portion 1722 of mirror holder 1720 from swingingwhen the LiDAR system is subject to a large acceleration (e.g., anacceleration of 1 g-2 g level) or deceleration. In some embodiments, theheight of bottom portion 1724 of mirror holder 1720 is lower than thedepth of receiving recess 1712 of bottom holder 1710. In this way, thespace between bottom portion 1724 and receiving recess 1712 allows forthe movement of mirror holder 1720 with respect to bottom holder 1710.For example, mirror holder 1720 may tilt within about ±1° with respectto bottom holder 1710. The extent of the tilting can be adjusted throughset screws 1732. For example, when set screw 1732 is driven towardmirror holder 1720, the tilting angle of mirror holder 1720 isincreased. On the contrary, when the set screw 1732 is driven away frommirror holder 1720, the tilting angle may be decreased. For a typicalapplication, a tilting angle about ±1° may provide a compensation rangeof about ±3.5 meters at a detecting range of 200 meters. It should benoted that various ranges of tilting angle other than ±1° have beencontemplated.

IV. Mirror Mount

FIG. 19 illustrates a perspective view of an example of third unit 430according to certain embodiments. In the illustrated example, third unit430 includes a mirror bracket 1910 and a bracket frame 1920. Mirrorbracket 1910 includes a receiving groove 1912 for receiving a mirror,such as third deflector 350 as shown in FIG. 3. Mirror bracket 1910 isconnected at the lower portion with the upper portion of bracket frame1920. As shown in FIG. 19, four bores 1914 a, 1914 b, 1914 c, and 1914 dare formed through mirror bracket 1910.

FIG. 20 illustrates a perspective view of an example of third unit 430according to certain embodiments. As shown in FIG. 20, four bores 1924a, 1924 b, 1924 c, and 1924 d are formed through the upper portion ofbracket frame 1920. When mirror bracket 1910 is assembled with bracketframe 1920, bores 1914 a-1914 d and bores 1924 a-1924 d are aligned witheach other. In some embodiments, the upper portion of bracket frame 1920is in a substantially rectangular shape with four corners. A bore 1928is formed at each corner of the upper portion of bracket frame 1920. Insome embodiments, bracket frame 1920 has a boss 1926 formed on a surface1922 distant from mirror bracket 1910 when assembled. In someembodiments, a countersink is formed around each of the openings ofbores 1924 a-1924 d on the surface of boss 1926.

FIG. 21 illustrates another perspective view of third unit 430 accordingto certain embodiments. As shown in FIG. 21, an elastic member 2110 isinserted in a bore in bores 1914 a-1914 d (shown in FIG. 19) and a borein bores 1924 a-1924 d. In some embodiments, elastic member 2110 in therelaxed state is shorter than the total thickness of mirror bracket 1910and bracket frame 1920, and elastic member 2110 has a hook at each endto hang on a dowel pin 2112. In this way, mirror bracket 1910 andbracket frame 1920 is securely coupled by the elastic force of elasticmembers 2110. In some embodiments, a countersink is formed around eachof the openings of bores 1914 a-1914 d in receiving groove 1912 to makethe countersink conform with the shape of dowel pin 2112, as shown inFIG. 19. In this way, dowel pins 2112 do not protrude into receivinggroove 1912, thereby avoiding interference with the mirror received inreceiving groove 1912. A countersink is formed around each of theopenings of bores 1924 a-1924 d. The countersinks of bores 1924 a-1924 dconform with the shape of dowel pins 2112. In this way, dowel pins 2112do not protrude from the surface of the boss 1926, thus avoidingpossible interference with other components of the LiDAR system.

As shown in FIG. 21, third unit 430 includes screws 2130 a-2130 dinserted in bores 1928 (shown in FIG. 20) formed through bracket frame1920. A screw 2130 a, 2130 b, 2130 c, or 2130 d is inserted in each bore1928. Bores 1928 are formed with threads that can fit with screws 2130a-2130 d. In the relaxed state, screws 2130 a-2130 d are longer than thethickness of the upper portion of bracket frame 1920. The distance andangle between mirror bracket 1910 and bracket frame 1920 can be adjustedthrough the four screws 2130 a-2130 d. Therefore, the orientation of themirror received in receiving groove 1912 can be adjusted.

FIG. 22 illustrates a perspective view of third unit 430 within acoordinate system according to certain embodiments. Adjustment of theorientation and location of mirror bracket 1910 with respect to bracketframe 1920 is described with reference to FIG. 22. If screws 2130 a-2130d are all driven toward mirror bracket 1910, or are driven away frommirror bracket 1910, mirror bracket 1910 may have a translationssubstantially along the −z axis or z axis. In addition, an orientationof mirror bracket 1910 with respect to bracket frame 1920 may beachieved through driving screws 2130 a-2130 d. For example, screws 2130a and 2130 b can be driven toward mirror bracket 1910 to increase thedistance between mirror bracket 1910 and bracket frame 1920 around thelocations of screws 2130 a and 2130 b, and thus mirror bracket 1910 maypivot around x axis in a first direction to increase the pitch angle.Similarly, screws 2130 c and 2130 d can be driven toward mirror bracket1910 to increase the distance between mirror bracket 1910 and bracketframe 1920 around the locations of screws 2130 c and 2130 d, and thusmirror bracket 1910 may pivot around x axis in a second directionopposite to the first direction to reduce the pitch angle. Similarly,screws 2130 a and 2130 d can be driven toward mirror bracket 1910 toincrease the distance between mirror bracket 1910 and bracket frame 1920around the locations of screws 2130 a and 2130 d, and thus mirrorbracket 1910 may pivot around y axis in a first direction to increasethe roll angle. Similarly, screws 2130 b and 2130 c can be driven towardmirror bracket 1910 to increase the distance between mirror bracket 1910and bracket frame 1920 around the locations of screws 2130 b and 2130 c,and thus mirror bracket 1910 may pivot around y axis in a seconddirection opposite to the first direction to decrease the roll angle.

FIG. 23A illustrates a perspective view of an example of third unit 430according to certain embodiments. FIG. 23B illustrates the range ofpitch angle adjustment in third unit 430. For convenience and clarity,FIG. 23B may not show all components of third unit 430, and relevantcomponents involved may have been simplified. Adjustment of a pitchangel α of mirror bracket 1910 with respect to bracket frame 1920 isdescribed with reference to FIGS. 23A-23B, together with FIG. 22. Asshown in FIG. 23B, a pitch angle α around x axis between mirror bracket1910 and bracket frame 1920 may be adjusted by driving screws 2130 a(shown in FIG. 22) and 2130 b. It is noted that mirror bracket 1910 maytilt with respect to bracket frame 1920 when only one of the screws 2130a and 2130 b is driven, where a pitch angle α and a roll angle β may beadjusted concurrently. In a similar way, a pitch angle α between mirrorbracket 1910 and bracket frame 1920 may be adjusted by driving screws2130 c and 2130 d (shown in FIG. 22). For example, if the distancebetween mirror bracket 1910 and bracket frame 1920 can be adjusted bydriving screws 2130 a-2130 d within a range of h (e.g., about ±1 mm),and the distance between the centers of screws 2130 b and 2130 c is d3(e.g., about 21 mm), the maximum pitch angle α adjustment in the firstdirection achieved by driving screws 2130 a and 2130 b is about 5.44°.Similarly, the maximum pitch angle α adjustment in the second directionachieved by driving screws 2130 c and 2130 d is about −5.44° Therefore,the range of the pitch angle adjustment may be between, for example,about −5.44° and about +5.44°.

FIG. 24A illustrates another perspective view of third unit 430according to certain embodiments. FIG. 24B illustrates the range of rollangle adjustment in third unit 430. For convenience and clarity, FIG.24B may not show all components of third unit 430, and relevantcomponents involved may have been simplified. The adjustment to the rollangle β around y axis is described with reference to FIGS. 24A and 24B.As shown in FIG. 24B, a roll angle β between mirror bracket 1910 andbracket frame 1920 may be adjusted by driving screws 2130 a and 2130 d(shown in FIG. 22). It is noted that mirror bracket 1910 will tilt withrespect to bracket frame 1920 if only one of the screws 2130 a and 2130d is driven, that is, a pitch angle α and a roll angle β can be achievedconcurrently. In a similar way, a roll angle β between mirror bracket1910 and bracket frame 1920 may be adjusted by driving screws 2130 b and2130 c (shown in FIG. 22). For example, if the distance between mirrorbracket 1910 and bracket frame 1920 can be adjusted by driving screws2130 a-d within the range of h (e.g., about ±1 mm), and the distancebetween the centers of screws 2130 a and 2130 b is d4 (e.g., about 31.2mm), the maximum roll angle β adjustment in the first direction achievedby driving screws 2130 a and 2130 d is about 3.66°. Similarly, themaximum roll angle β adjustment in the second direction achieved bydriving screws 2130 b and 2130 c is about −3.66° Therefore, the range ofthe roll angle adjustment may be between, for example, about −3.66° andabout +3.66°.

V. Receiver Assembly

FIG. 25 illustrates an example of fourth unit 440 according to certainembodiments. As described above, in some embodiments, lens 360 andphotodetector 370 shown in FIG. 3 can be mounted on fourth unit 440. Insome embodiments, additional mirrors or other optical components canalso be mounted on fourth unit 440 to change the direction of the lightpath of light beam 352 shown in FIG. 3 in order to minimize the size ofthe LiDAR system. In the example shown in FIG. 25, fourth unit 440 mayinclude a carrier frame 2510 that is mounted on chassis 450 (shown inFIG. 4). Carrier frame 2510 may extends upright when assembled. Two lensmounts 2520 a and 2520 b may be mounted on a first side 2512 of carrierframe 2510. Lenses 2540 a and 2540 b may be mounted on lens mounts 2520a and 2520 b, respectively. An example of lens mounts 2520 a and 2520 bis described in detail below. Fourth unit 440 may further includereceiver assemblies 2530 a and 2530 b, where receiver assembly 2530 amay be configured to face lens 2540 a mounted on lens mount 2520 a, andreceiver assembly 2530 b may be configured to face lens 2540 b mountedon lens mount 2520 b. An example of receiver assemblies 2530 a and 2530b is described in detail below. In the example shown in FIG. 25, lensmount 2520 a and lens mount 2520 b may be similar in structure andfunction. Receiver assemblies 2530 a and 2530 b may also be similar instructure and function. For clarity, the description below may onlyrefer to lens mount 2520 a and receiver assembly 2530 a.

FIGS. 26A and 26B illustrate an example of a carrier frame (e.g.,carrier frame 2510) for mounting lenses and photodetectors according tocertain embodiments. FIG. 26A illustrates first side 2512 of carrierframe 2510. FIG. 26B illustrates an opposite second side 2514 of carrierframe 2510. In the example shown in FIG. 26A, carrier frame 2510 mayinclude bores 2602 that can be used to secure receiver assemblies 2530 aand 2530 b, which are described in detail below. As shown in FIG. 26B,carrier frame 2510 may include countersink bores 2516 a-2516 d. Carrierframe 2510 may also include bores 2517. Lens mounts 2520 a-2520 b may besecured to carrier frame 2510 through countersink bores 2516 a-2516 dand may be adjusted through bores 2517 as described in detail below.

FIGS. 27A and 27B illustrate an example of lens mount 2520 a indifferent perspective views according to certain embodiments. In theillustrated example, lens mount 2520 a may be in a substantiallyC-shape, including a top lateral arm 2712, a connecting web 2714, and abottom lateral arm 2716. Connecting web 2714 may include a countersinkbore 2718 at each end of connecting web 2714. When lens mount 2520 a isassembled with carrier frame 2510, countersink bore 2718 on lens mount2520 a may be aligned with countersink bore 2516 on carrier frame 2510.An elastic member 2717 (e.g., a wire spring or an extension spring) maybe inserted in countersink bore 2718 and countersink bore 2516. Elasticmember 2717 may have a hook on each end to hang on a dowel pin 2715. Inthe relaxed state, elastic member 2717 may be shorter than the sum ofthe thickness of carrier frame 2510 and the thickness of connecting web2714. In this way, elastic member 2717 may impose an elastic force tosecure lens mount 2520 a to carrier frame 2510. Dowel pin 2715 on eachend of elastic member 2717 may be received within the countersink ofcountersink bore 2718 or the countersink of countersink bore 2516, andthus may not protrude from the surface of connecting web 2714 of lensmount 2520 a and second side 2514 of carrier frame 2510. In this way,dowel pin 2715 may not obstruct the optical path through lens mount 2520a.

Set screws 2518 a and 2518 b may extend through bores 2517. Set screws2518 a and 2518 b may be longer than the thickness of carrier frame2510. The distance between lens mount 2520 a and carrier frame 2510along the z axis (e.g., a direction normal to the first side 2512 ofcarrier frame 2510) can be adjusted by driving set screws 2518 a and2518 b. For example, the distance may be increased when driving setscrews 2518 a and 2518 b toward lens mount 2520 a, and the distance maybe decreased when driving set screws 2518 a and 2518 b away from lensmount 2520 a. In this way, the alignment between the lens mounted onlens mount 2520 a and the optical device (e.g., photodetector) mountedon receiver assembly 2530 a (shown in FIG. 25) can be adjusted.

The orientation of lens mount 2520 a with respect to carrier frame 2510can also be adjusted by driving set screws 2518 a and 2518 bdifferently. For example, set screw 2518 a may be driven to adjust theangle between lens mount 2520 a and carrier frame 2510. In anotherexample, two set screws 2518 a and 2518 b on two ends of connecting web2714 of lens mount 2520 a can be driven by different amounts to adjustthe angle between lens mount 2520 a and carrier frame 2510. For example,set screw 2518 a can be driven toward lens mount 2520 a, such that lensmount 2520 a may rotate around the y axis in a first direction. If setscrew 2518 a is not driven and set screw 2518 b is driven toward lensmount 2520 a, lens mount 2520 a may rotate around the y axis in a seconddirection opposite to the first direction. In this way, the orientationof the lens mounted on lens mount 2520 a can be adjusted. In someembodiments, lens mount 2520 a may include bores 2722 in top lateral arm2712 and bottom lateral arm 2716. For example, there may be two bores2722 in each of top later arm 2712 and bottom lateral arm 2716. A setscrew 2711 may be inserted in each bore 2722 to secure the lens (e.g.,lens 2540 a shown in FIG. 25) on lens mount 2520 a. As described above,lens mount 2520 b may have a similar structure and include similarcomponents as lens mount 2520 a.

FIG. 28 illustrates an example of a receiver assembly (e.g., receiverassembly 2530 a) in a perspective view according to certain embodiments.In the illustrated example, receiver assembly 2530 a may include a hub2810, a board mount 2820, and a circuit board 2830. Circuit board 2830may include, for example, a photodetector, an image sensor, drivercircuits, and the like installed thereon. Circuit board 2830 may bemounted on board mount 2820, which may be coupled to hub 2810 asdescribed in detail below. Hub 2810 may be mounted on carrier frame 2510and may be used to adjust the position of board mount 2820, and thus theposition of circuit board 2830 as described in detail below.

FIG. 29 illustrates an example of receiver assembly 2530 a in anexploded view. Receiver assembly 2530 a may be secured to carrier frame2510 such that the optical device mounted on receiver assembly 2530 a,such as photodetector 370 shown in FIG. 3, may face lens 2540 a as shownin FIG. 25. In the example shown in FIG. 29, receiver assembly 2530 amay include hub 2810, in which a rotate shaft 2912 may be inserted.Rotate shaft 2912 may be used to drive board mount 2820, on whichcircuit board 2830 is mounted. An optical device, such as photodetector370 (shown in FIG. 3) is mounted on circuit board 2830.

As shown in FIG. 29, hub 2810 may include a through bore 2932 along alongitudinal direction (e.g., the y axis). Board mount 2820 may includea through bore 2934, which may be aligned with through bore 2932 in hub2810 when assembled. Rotate shaft 2912 may be inserted in through bore2932 and through bore 2934. Receiver assembly 2530 a may also includesecuring bolts 2902 and 2926. Securing bolt 2902 may be fitted to oneend of rotate shaft 2912, and securing bolt 2926 may be fitted on theother end of rotate shaft 2912. Securing bolts 2902 and 2926 mayrotatably secure rotate shaft 2912 such that rotate shaft 2912 can driveboard mount 2820 to rotate around a central axis (e.g., the y axis) ofrotate shaft 2912. Receiver assembly 2530 a may also include elasticmembers 2908 and 2916, such as wire springs or torque springs. Elasticmember 2908 may be sleeved on one end of rotate shaft 2912, and elasticmember 2916 may be sleeved on the other end of rotate shaft 2912.Elastic members 2908 and 2916 may have opposite spiral directions so asto provide restoring forces on rotate shaft 2912. When rotate shaft 2912is driven to rotate, elastic members 2908 and 2916 may have the tendencyto restore the rotary position of rotate shaft 2912.

Hub 2810 may include a bore 2936 along a vertical direction (e.g., zdirection) to provide a passage for a driving shaft 2910 to connect withrotate shaft 2912 when assembled. Rotate shaft 2912 may also include abore 2938 formed along the vertical direction as shown in FIG. 29. Anend 2940 of driving shaft 2910 may be inserted in bore 2938 whenassembled. Hub 2810 may further include a bore 2942 formed at a topportion of hub 2810 along a lateral direction (e.g., x direction) asshown in FIG. 29. A set screw 2906 may be inserted in bore 2942 to drivedriving shaft 2910 and thus drive rotate shaft 2912 to rotate boardmount 2820.

Bore 2936 may be in an oblong shape to provide certain adjustment space.For example, set screw 2906 may be driven along the x axis to pressagainst driving shaft 2910, which may drive rotate shaft 2912 to rotatearound the y axis. The rotation of rotate shaft 2912 may rotate boardmount 2820 around the y axis in a first direction. Set screw 2906 mayalso be driven along the −x axis to relax the compression againstdriving shaft 2910. The restoring force imposed by elastic members 2908and 2916 may drive rotate shaft 2912 around the y axis, thus therotation of rotate shaft 2912 may rotate board mount 2820 around the yaxis in a second direction opposite to the first direction.

Board mount 2820 includes a bore (not shown in FIG. 29) formed along avertical direction (e.g., z direction). A bolt 2922 is inserted in thebore with an elastic member 2920 sleeved on bolt 2922 to press againstrotate shaft 2912 in the vertical direction (e.g., the z direction).Board mount 2820 includes a boss 2914 formed on a first side 2925 thatis distant from circuit board 2830. A bore 2945 is formed in a topsurface of boss 2914. A set screw 2924 is inserted in bore 2945 toadjust the vertical translation (along the z axis) of rotate shaft 2912within bore 2934, hence adjust the vertical translation (along the zaxis) of board mount 2820. For example, set screw 2924 may be driven topress against rotate shaft 2912 along −z axis. Board mount 2820 maytranslate along the z axis due to the counterforce imposed by rotateshaft 2912 because rotate shaft 2912 is secured to hub 2810, which issecured to carrier frame 2510 as shown in FIG. 4. If set screw 2924 isdriven to relax the compression against rotate shaft 2912, board mount2820 may translate along the −z axis due to elastic force imposed byelastic member 2920.

As shown in FIG. 29, circuit board 2830 includes two positioning notches2944, each of which is aligned with one positioning pin 2948 on boardmount 2820. Circuit board 2830 includes two bores 2946, each of which isaligned with a bore 2950 on board mount 2820 when assembled. Fastener2930 may be inserted in bores 2946 and 2950 to secure circuit board 2830to board mount 2820.

As shown in FIG. 29, hub 2810 may include an ear 2952 on each side alongthe vertical direction (e.g., the z axis). Ear 2952 on the bottom of hub2810 is not shown. A bore 2954 is formed in ear 2952 along the x axis.As shown in FIG. 25, when assembling receiver assemblies 2530 a-2530 bto carrier frame 2510, bore 2954 shown in FIG. 29 and bore 2602 shown inFIG. 26A can be aligned with each other. A fastener (not shown) may beinserted in bore 2602 and bore 2954 to secure receiver assemblies 2530a-2530 b to carrier frame 2510.

FIG. 30 illustrates an example of board mount 2820 in a perspectiveview. As shown in FIG. 30, board mount 2820 has a substantially L-shapewith a long arm 3010 and a short arm 3020. Board mount 2820 includesstuds 3006 on a second side 3002 that is facing circuit board 2830(shown in FIG. 29) when assembled. Studs 3006 are formed at an endportion of long arm 3010 and an end portion of short arm 3020. Bore 2950is formed in each stud 3006. In some embodiments, bore 2950 is a throughbore. In some embodiments, bore 2950 is a blind bore. Board mount 2820may include two positioning pins 2948 on second side 3002 atsubstantially the intersection of long arm 3010 and short arm 3020.Positioning pins 2948 may help appropriately position circuit board 2830(shown in FIG. 29) with respect to board mount 2820.

Referring back to FIG. 29, adjustment of board mount 2820 with respectto the carrier frame 2510 is described. As described above, board mount2820 may rotate around the central axis of the rotate shaft 2912 bydriving set screw 2906. Therefore, the optical device on circuit board2830, such as photodetector 370 as shown in FIG. 3, can rotate aroundthe central axis of rotate shaft 2912. When receiver assembly 2530 a andlens mount 2520 a are secured to carrier frame 2510, the rotaryalignment between photodetector 370 and lens 360 (shown in 3) can beadjusted. In addition, the vertical translation (e.g., along the z axis)of board mount 2820 with respect to rotate shaft 2912 can be achieved bydriving set screw 2924. Therefore, the optical device on circuit board2830, such as photodetector 370 as shown in FIG. 3 can have a verticaltranslation with respect to the carrier frame 2510 when assembled. Whenreceiver assembly 2530 a and lens mount 2520 a are secured to carrierframe 2510, a vertical translation of photodetector 370 with respect tolens 360 (shown in FIG. 3) can be achieved. In some embodiments,receiver assembly 2530 a and lens mount 2520 a both form an angle withrespect to horizontal direction as shown in FIG. 25. In theseembodiments, the vertical translation (along z axis shown in FIG. 29) ofboard mount 2820 with respect to rotate shaft 2912 may cause the opticaldevice on receiver assembly 2530 a to have a horizontal and verticaltranslation components with respect to the lens on lens mount 2520 a.Furthermore, as described above with reference to FIGS. 26-27B, theorientation of lens mount 2520 a with respect to carrier frame 2510 canbe adjusted by driving set screws 2518 a-2518 b (shown in FIG. 27B).Therefore, the orientation of the lens on lens mount 2520 a with respectto the optical device on circuit board 2830 can be adjusted by drivingset screws 2518 a-2518 b. The lateral translation (along z axis in FIG.27B) of the lens on lens mount 2520 a with respect to the optical deviceon circuit board 2830 can also be adjusted.

Numerous specific details are set forth herein to provide a thoroughunderstanding of the claimed subject matter. However, those skilled inthe art will understand that the claimed subject matter may be practicedwithout these specific details. In other instances, methods,apparatuses, or systems that would be known by one of ordinary skillhave not been described in detail so as not to obscure claimed subjectmatter. The various embodiments illustrated and described are providedmerely as examples to illustrate various features of the claims.However, features shown and described with respect to any givenembodiment are not necessarily limited to the associated embodiment andmay be used or combined with other embodiments that are shown anddescribed. Further, the claims are not intended to be limited by any oneexample embodiment.

While the present subject matter has been described in detail withrespect to specific embodiments thereof, it will be appreciated thatthose skilled in the art, upon attaining an understanding of theforegoing may readily produce alterations to, variations of, andequivalents to such embodiments. Accordingly, it should be understoodthat the present disclosure has been presented for purposes of examplerather than limitation, and does not preclude inclusion of suchmodifications, variations, and/or additions to the present subjectmatter as would be readily apparent to one of ordinary skill in the art.Indeed, the methods and systems described herein may be embodied in avariety of other forms; furthermore, various omissions, substitutionsand changes in the form of the methods and systems described herein maybe made without departing from the spirit of the present disclosure. Theaccompanying claims and their equivalents are intended to cover suchforms or modifications as would fall within the scope and spirit of thepresent disclosure.

Although the present disclosure provides certain example embodiments andapplications, other embodiments that are apparent to those of ordinaryskill in the art, including embodiments which do not provide all of thefeatures and advantages set forth herein, are also within the scope ofthis disclosure. Accordingly, the scope of the present disclosure isintended to be defined only by reference to the appended claims.

Unless specifically stated otherwise, it is appreciated that throughoutthis specification discussions utilizing terms such as “processing,”“computing,” “calculating,” “determining,” and “identifying” or the likerefer to actions or processes of a computing device, such as one or morecomputers or a similar electronic computing device or devices, thatmanipulate or transform data represented as physical electronic ormagnetic quantities within memories, registers, or other informationstorage devices, transmission devices, or display devices of thecomputing platform.

The system or systems discussed herein are not limited to any particularhardware architecture or configuration. A computing device can includeany suitable arrangement of components that provide a result conditionedon one or more inputs. Suitable computing devices include multi-purposemicroprocessor-based computer systems accessing stored software thatprograms or configures the computing system from a general purposecomputing apparatus to a specialized computing apparatus implementingone or more embodiments of the present subject matter. Any suitableprogramming, scripting, or other type of language or combinations oflanguages may be used to implement the teachings contained herein insoftware to be used in programming or configuring a computing device.

Embodiments of the methods disclosed herein may be performed in theoperation of such computing devices. The order of the blocks presentedin the examples above can be varied—for example, blocks can bere-ordered, combined, and/or broken into sub-blocks. Certain blocks orprocesses can be performed in parallel.

Conditional language used herein, such as, among others, “can,” “could,”“might,” “may,” “e.g.,” and the like, unless specifically statedotherwise, or otherwise understood within the context as used, isgenerally intended to convey that certain examples include, while otherexamples do not include, certain features, elements, and/or steps. Thus,such conditional language is not generally intended to imply thatfeatures, elements and/or steps are in any way required for one or moreexamples or that one or more examples necessarily include logic fordeciding, with or without author input or prompting, whether thesefeatures, elements and/or steps are included or are to be performed inany particular example.

The terms “comprising,” “including,” “having,” and the like aresynonymous and are used inclusively, in an open-ended fashion, and donot exclude additional elements, features, acts, operations, and soforth. Also, the term “or” is used in its inclusive sense (and not inits exclusive sense) so that when used, for example, to connect a listof elements, the term “or” means one, some, or all of the elements inthe list. The use of “adapted to” or “configured to” herein is meant asopen and inclusive language that does not foreclose devices adapted toor configured to perform additional tasks or steps. Additionally, theuse of “based on” is meant to be open and inclusive, in that a process,step, calculation, or other action “based on” one or more recitedconditions or values may, in practice, be based on additional conditionsor values beyond those recited. Similarly, the use of “based at least inpart on” is meant to be open and inclusive, in that a process, step,calculation, or other action “based at least in part on” one or morerecited conditions or values may, in practice, be based on additionalconditions or values beyond those recited. Headings, lists, andnumbering included herein are for ease of explanation only and are notmeant to be limiting.

The various features and processes described above may be usedindependently of one another, or may be combined in various ways. Allpossible combinations and sub-combinations are intended to fall withinthe scope of the present disclosure. In addition, certain method orprocess blocks may be omitted in some embodiments. The methods andprocesses described herein are also not limited to any particularsequence, and the blocks or states relating thereto can be performed inother sequences that are appropriate. For example, described blocks orstates may be performed in an order other than that specificallydisclosed, or multiple blocks or states may be combined in a singleblock or state. The example blocks or states may be performed in serial,in parallel, or in some other manner. Blocks or states may be added toor removed from the disclosed examples. Similarly, the example systemsand components described herein may be configured differently thandescribed. For example, elements may be added to, removed from, orrearranged compared to the disclosed examples.

What is claimed is:
 1. A light detection and ranging (LiDAR) systemcomprising: a chassis; and a galvo mirror assembly comprising: a mirrorholder including a handle and a galvo mirror for receiving andreflecting a light beam; a galvo mirror mount detachably mounted on thechassis and including a recess for receiving the handle of the mirrorholder; two elastic members coupled to the handle of the mirror holderand the galvo mirror mount; two set screws in contact with the handle ofthe mirror holder and at least partially in the galvo mirror mount, thetwo set screws individually adjustable to change a compression forceapplied to at least one of the two elastic members and a tilt angle ofthe mirror holder and the galvo mirror with respect to a verticaldirection; and a galvo motor in the galvo mirror mount and configured torotate the mirror holder.
 2. The LiDAR system of claim 1, wherein: thehandle of the mirror holder includes a bottom portion and a top portion,wherein the bottom portion is characterized by a first diameter largerthan a second diameter of the top portion but smaller than a thirddiameter of the recess in the galvo mirror mount; the bottom portion ofthe handle of the mirror holder is in the recess; the galvo mirror mountincludes: a body that includes the recess; and a cap on the recess, thecap including an aperture characterized by a fourth diameter larger thanthe second diameter but smaller than the first diameter, wherein the topportion of the handle of the mirror holder extends through the cap; andthe two elastic members and the two set screws are at least partiallywithin the cap.
 3. The LiDAR system of claim 2, wherein: the capincludes a first half and a second half; and the first half and thesecond half of the cap are detachably coupled to the body.
 4. The LiDARsystem of claim 3, wherein: the two set screws are at least partiallywithin the first half of the cap; and the two elastic members are atleast partially within the second half of the cap.
 5. The LiDAR systemof claim 3, wherein each of the first half and the second half of thecap is detachably coupled to the body by two or more fasteners.
 6. TheLiDAR system of claim 2, wherein: the body of the galvo mirror mountcomprises a notch; the bottom portion of the handle of the mirror holdercomprises a protrusion; and the protrusion extends through the notch. 7.The LiDAR system of claim 1, wherein the two elastic members include twocompression springs.
 8. The LiDAR system of claim 7, wherein each of thetwo compression springs is characterized by a spring constant greaterthan a threshold value.
 9. The LiDAR system of claim 7, wherein the twocompression springs include wave springs.
 10. The LiDAR system of claim1, further comprising a first mirror assembly, the first mirror assemblycomprising: a bracket detachably mounted on the chassis; a first mirrormount configured to hold a first mirror for receiving and deflecting thelight beam reflected by the galvo mirror to a photodetector; a first setof elastic connectors attached to both the bracket and the first mirrormount to couple the first mirror mount to the bracket; and a first setof screws extending through the bracket and in contact with the firstmirror mount, wherein the first set of screws are adjustable to changeat least one of a distance or an orientation of the first mirror mountwith respect to the bracket.
 11. The LiDAR system of claim 10, wherein:the first set of elastic connectors include three or more extensionsprings; and each of the three or more extension springs is attached tothe bracket through a respective first dowel pin and is attached to thefirst mirror mount through a respective second dowel pin.
 12. The LiDARsystem of claim 10, wherein the first set of screws include three ormore screws arranged in noncollinear locations.
 13. The LiDAR system ofclaim 10, wherein the first set of screws are individually adjustable tomove the first mirror mount with three degrees of freedom with respectto the bracket.
 14. The LiDAR system of claim 10, further comprising asecond mirror assembly detachably mounted on the chassis and configuredto receive and direct the light beam deflected by the first mirror tothe photodetector.
 15. The LiDAR system of claim 10, further comprising:a carrier frame detachably mounted on the chassis; a lens assemblycoupled to the carrier frame, the lens assembly comprising: a lensholder detachably mounted on the carrier frame by a second set ofelastic connectors attached to the carrier frame and the lens holder;and a lens installed on the lens holder and positioned to receive thelight beam deflected by the first mirror to form an image on thephotodetector; and a second set of screws extending through the carrierframe and in contact with the lens holder, wherein the second set ofscrews are adjustable to change at least one of a distance or anorientation of the lens holder with respect to the carrier frame. 16.The LiDAR system of claim 15, further comprising a light sensor assemblydetachably mounted on the carrier frame and configured to both rotateand linearly move with respect to the carrier frame, the light sensorassembly comprising: a board mount; a sensor board installed on theboard mount; and the photodetector installed on the sensor board. 17.The LiDAR system of claim 1, further comprising an optical scannerassembly, the optical scanner assembly comprising: a scanner board forinstalling an optical scanner thereon; a mechanical mount; a first setof three or more adjustable connectors coupling the scanner board to themechanical mount; and a first set of elastic members between themechanical mount and the scanner board and sleeved on the first set ofthree or more adjustable connectors, wherein the first set of three ormore adjustable connectors are adjustable to adjust a position of thescanner board such that the light beam scanned by the optical scanner isreceived by the galvo mirror.
 18. A light detection and ranging (LiDAR)system comprising: a chassis; and a plurality of optical transceiversmounted on the chassis, each optical transceiver of the plurality ofoptical transceivers configured to transmit light to and receive lightfrom a respective field of view, wherein each optical transceiver of theplurality of optical transceivers comprises: a galvo mirror assemblycomprising: a mirror holder including a handle and a galvo mirror forreceiving and reflecting a light beam; a galvo mirror mount detachablymounted on the chassis and including a recess for receiving the handleof the mirror holder; two compression springs coupled to the handle ofthe mirror holder and the galvo mirror mount; two set screws in contactwith the handle of the mirror holder and at least partially in the galvomirror mount, the two set screws individually adjustable to change acompression force applied to at least one of the two compression springsand a tilt angle of the mirror holder and the galvo mirror with respectto a vertical direction; and a galvo motor in the galvo mirror mount andconfigured to rotate the mirror holder.
 19. The LiDAR system of claim18, wherein: the handle of the mirror holder includes a bottom portionand a top portion, wherein the bottom portion is characterized by afirst diameter larger than a second diameter of the top portion butsmaller than a third diameter of the recess in the galvo mirror mount;the bottom portion of the handle of the mirror holder is in the recess;the galvo mirror mount includes: a body that includes the recess; and acap on the recess, the cap including an aperture characterized by afourth diameter larger than the second diameter but smaller than thefirst diameter, wherein the top portion of the handle of the mirrorholder extends through the cap; and the two compression springs and thetwo set screws are at least partially within the cap.
 20. The LiDARsystem of claim 19, wherein: the cap includes a first half and a secondhalf; the first half and the second half of the cap are detachablycoupled to the body; the two set screws are at least partially withinthe first half of the cap; and the two compression springs are at leastpartially within the second half of the cap.